Leak detector of helium mass spectra is the is used technically at leak hunting instrument that is search gas with helium gas, it has the characteristic with function stability, tall sensitivity. It is the sensitivity in technology of vacuum leak hunting highest, uses the most generally leak hunting instrument.
Leak detector of helium mass spectra is magnetism slants the mass spectra of transition is analysed plan. Sensitivity of deflexion of only course magnetism instrument is LO- 9～ 10- 12Pam3／ S, use at the leak hunting of all sorts of vacuum systems and component widely. Photograph of deflexion of magnetism of dual class series connection instrument and deflexion of only course magnetism instrument is compared, background noise is reduced significantly. Its sensitivity can be amounted to 10- 14～ 10- 15Pam3／ S, apply to ultrahigh vacuum system, component to reach the leak hunting of yuan of parts of an apparatus. Leak detector of refluent helium mass spectra changed the structural position of convention instrument, by check park leak detector advocate smoke pump before class place, because this is had,leak hunting can fall in high-pressured force, need not liquid nitrogen and pollution of mass spectra room are little wait for a characteristic. Apply to the leak hunting of the vacuum system with poorer sanitation of big leakage rate, vacuum, its sensitivity can be amounted to 10- 12Pam3／ S.
(1) job principle and structure
Leak detector of helium mass spectra by ionic source, analyzer, collect implement, the composition such as the mass spectra chamber that compasses of cold cathode ionization constitutes and bleed system and electric part.
Leak detector of mass spectra of deflexion of magnetism of ① only course helium
It is with HZJ—l instrument now exemple. Introduce leak detector of mass spectra of deflexion of only course magnetism helium.
In mass spectra indoor have: Quicken by room of filament, ionization, ion extremely constitute ionic source; Comprise analyzer by adscititious and even magnetic field, fender and exit aperture; By control bar, collect extremely reach tall block composition to collect implement; Electrometer of enlarge of the first class is in charge of and compasses of cold cathode ionization. .
Inside ionization room N, aeriform ionization is become ionic, ionic below electric field action focusing is become bundle. Quickening voltage action to fall to be quickened with certain speed course extremely S1aperture enters analyzer. Below the action of even magnetic field, the ion that has fixed rate will move by circular contrail, its deflexion radius is calculable.
Visible, when B and U are calm value, not coessential carry on one's shoulder compares Me- 1ionic bundle deflexion radius R is different. The B of the instrument and R are fixed, adjust quicken voltage U to make helium ionic bundle pass exit aperture S fitly
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The working fundamental of leak detector of helium mass spectra
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